Specific Process Knowledge/Lithography/Development: Difference between revisions
Appearance
| Line 483: | Line 483: | ||
==Developer TMAH UV-lithography== | ==Developer TMAH UV-lithography== | ||
[[Image:SUSS DEV.JPG|300x300px|right|thumb|UV developer robot is located in | [[Image:SUSS DEV.JPG|300x300px|right|thumb|UV developer robot is located in E-4]] | ||
'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography click here]''' | '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography click here]''' | ||