Specific Process Knowledge/Lithography/Development: Difference between revisions
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==UV | ==Developer TMAH UV-lithography== | ||
[[Image:SUSS DEV.JPG|300x300px|right|thumb|UV developer robot is located in ?-?]] | [[Image:SUSS DEV.JPG|300x300px|right|thumb|UV developer robot is located in ?-?]] | ||
'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development# | '''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development#Developer_TMAH_UV-lithography click here]''' | ||
UV | Developer TMAH UV-lithography will be released Q3 2014. | ||
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=329 LabManager]''' | ||
===Process information=== | ===Process information=== | ||