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Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions

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|-  
|-  
| H<sub>2</sub> flow
| H<sub>2</sub> flow
|3 sccm
|3 slm
|0 sccm
|0 slm
|-
|-
|O<sub>2</sub> flow
|O<sub>2</sub> flow
|2 sccm
|2 slm
|5 sccm
|5 slm
|-  
|-  
|Temperature
|Temperature
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