Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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| Line 174: | Line 174: | ||
| 74µm / 90µm (IPG @5%) | | 74µm / 90µm (IPG @5%) | ||
|- | |- | ||
|[[ | |[[/PulseEnergy|Pulse energy]] | ||
| 0,07µJ (TB) | | 0,07µJ (TB) | ||
| 140µJ (TB) / 800 µJ (IPG) | | 140µJ (TB) / 800 µJ (IPG) | ||