Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
| Line 93: | Line 93: | ||
| align="left"| | | align="left"| | ||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
! Values from SAT (Nov. | ! Values from SAT (Nov. 2012) | ||
! Actual values (May | ! Actual values (May 2014) | ||
|- | |- | ||
| Repetition rate : 200kHz | | Repetition rate : 200kHz | ||