Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 149: | Line 149: | ||
| Spot size | | Spot size | ||
| 10µm | | 10µm | ||
| 74µm / 90µm (IPG) | | 74µm / 90µm (IPG @5%) | ||
|- | |- | ||
|[[media:26052014_LaserPulseEnergy.jpg|Pulse energy]] | |[[media:26052014_LaserPulseEnergy.jpg|Pulse energy]] | ||