Specific Process Knowledge: Difference between revisions
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==Overview of sample processing 3== | ==Overview of sample processing 3== | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Clean | ! Clean your sample | ||
|} | |} | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Drying Samples | ! Drying your Samples | ||
|} | |} | ||
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! | ! Create a layer/film on your sample | ||
|- | |- | ||
|Thermal Oxide growth | |Thermal Oxide growth | ||
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{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Thermal treatment of | ! Thermal treatment of your sample | ||
|} | |} | ||
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Make a mask on | ! Make a mask on your sample | ||
|- | |- | ||
|Lithography | |Lithography | ||
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Transfer pattern | ! Transfer pattern to your sample | ||
|- | |- | ||
|Wet etch | |Wet etch | ||
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Direct structure definition | ! Direct structure definition on your sample | ||
|- | |- | ||
|Imprinting | |Imprinting | ||
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{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
! Back end of | ! Back end processing of your sample | ||
|- | |- | ||
|Chip/die mounting | |Chip/die mounting | ||
Revision as of 12:29, 12 June 2014
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Overview of sample processing
| Clean the sample File:Cleaning.jpg |
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| Drying Samples File:Drying.jpg |
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| Make a layer on the sample or Film Formation File:Making a layer 1.jpg | |
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| Thermal Oxide growth | |
| Physical Vapour Deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
| Thermal treatment of the sample File:Thermal treatment 1.jpg |
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| Make a mask on the sample |
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| Lithography |
| Imprinting |
| Transfer pattern into the sample |
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| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition |
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| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
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| Characterize the sample |
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| Back end of the sample |
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| Chip/die mounting |
| Wire bonding |
| Dicing |
Overview of sample processing 2
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Overview of sample processing 3
| Clean your sample |
|---|
| Drying your Samples |
|---|
| Create a layer/film on your sample | |
|---|---|
| Thermal Oxide growth | |
| Physical Vapour Deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
| Thermal treatment of your sample |
|---|
| Make a mask on your sample |
|---|
| Lithography |
| Imprinting |
| Transfer pattern to your sample |
|---|
| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition on your sample |
|---|
| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
|---|
| Characterize the sample |
|---|
| Back end processing of your sample |
|---|
| Chip/die mounting |
| Wire bonding |
| Dicing |
