Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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It can produce features down to ~10µm size over a large area. It can scan over an area of up to ~15x15cm without moving the sample. By moving the sample on the large x-y-stage this area can be extended by stitching. | It can produce features down to ~10µm size over a large area. It can scan over an area of up to ~15x15cm without moving the sample. By moving the sample on the large x-y-stage this area can be extended by stitching. | ||
The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[ | The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[Specific_Process_Knowledge/Lithography/UVLithography/Mask_Design| here]]. | ||
== Technical specifications == | == Technical specifications == | ||