Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | ||
==How to order a mask== | ===How to order a mask=== | ||
Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | ||
The smallest feature size obtainable from Delta Mask is 1.5 µm. If you need structures smaller than this please write it specificly in the e-mail. Be aware that this will increase the price by at least a factor of 3. | The smallest feature size obtainable from Delta Mask is 1.5 µm. If you need structures smaller than this please write it specificly in the e-mail. Be aware that this will increase the price by at least a factor of 3. | ||