Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
Appearance
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|style="background:LightGrey; color:black"|Mask size | |style="background:LightGrey; color:black"|Mask size | ||
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5x5inch | *3x3inch | ||
*5x5inch (with adapter) | |||
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|style="background:LightGrey; color:black"|Alignment modes | |style="background:LightGrey; color:black"|Alignment modes | ||