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Specific Process Knowledge/Lithography/Development: Difference between revisions

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==Developer robot: TMAH==
==UV developer robot==
[[Image:KSspinner.JPG|300x300px|right|thumb|Developer robot: TMAH is located in C-1]]
[[Image:KSspinner.JPG|300x300px|right|thumb|UV developer robot is located in ?-?]]


'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development#Developer_robot:_TMAH click here]'''
'''Feedback to this section''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Development#UV developer robot click here]'''


Developer robot: TMAH will be installed Q3 2014.
UV developer robot will be installed Q3 2014.


'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager]'''
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager]'''