Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Two alignment options are available: top side alignment (TSA) with a split field or a video microscope and back side alignment (BSA) with BSA microscope. It is also possible to make IR- light alignment. | Two alignment options are available: top side alignment (TSA) with a split field or a video microscope and back side alignment (BSA) with BSA microscope. It is also possible to make IR- light alignment. | ||
'''The user manual(s), quality control procedure(s) and results and contact information can be found | '''The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=44 LabManager'''. | ||
===Process information=== | ===Process information=== | ||