Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 LabManager]''' | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=331 LabManager]''' | ||
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===Process information=== | |||
'''Positive tone resists:''' | |||
'''AZ 5214E''' | |||
Spinning curve for AZ 5214E. | |||
'''Negative tone resists''' | |||
''' AZ nLoF 2020''' | |||
Spinning curve for AZ nLoF 2020. | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||