Specific Process Knowledge/Lithography/Development: Difference between revisions
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'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager]''' | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=324 LabManager]''' | ||
===Process information=== | |||
'''Recipes:''' | |||
*nLoF_40x2 | |||
*MiR701 60s | |||
*DUV 60s | |||
*UTIL-BE | |||
*UTIL-DR | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||