Specific Process Knowledge/Lithography/Development: Difference between revisions

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-AZ 726 MIF (2.38% TMAH in water)
+AZ 351B (NaOH and sodium borate salt) diluted 1:5 in water
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Method
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-Puddle
+Submersion
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 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters
 |style="background:LightGrey; color:black"|Temperature
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-Room temperature
+°C
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 |style="background:LightGrey; color:black"|Agitation
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-none
+Circulation and mechanical
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 !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates