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Specific Process Knowledge/Lithography/Development: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 144: Line 144:
''Standard development times''
''Standard development times''


AZ 5214E:
'''AZ 5214E:'''
*1.5µm resist is 60 sec
*1.5µm resist: 60 sec
*2.2µm resist is 70 sec
*2.2µm resist: 70 sec
*4.2µm resist is 3 min
*4.2µm resist: 3 min
AZ 4562:
'''AZ 4562:'''
*10µm resist is 5 min
*10µm resist: 5 min


====Procedure for making a new developer====  
====Procedure for making a new developer====  
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