Specific Process Knowledge/Lithography/LiftOff: Difference between revisions
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== Process information == | == Process information == | ||
Process recommandations for Lift-off wet bench: | |||
*Place the wafers in a dedicated wafer holder. | *Place the wafers in a dedicated wafer holder. | ||
*Put the holder in the acetone and start the ultrasound. The strip off time is depending of resist thickness. | *Put the holder in the acetone and start the ultrasound. The strip off time is depending of resist thickness. | ||