Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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= The Hummer Sputter coater = | = The Hummer Sputter coater = | ||
[[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater located in service area | [[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater located in service area Cx1]] | ||
The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers). | The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers). | ||
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One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM. | One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM. | ||
The Hummer sputter coater is located in servie area | The Hummer sputter coater is located in servie area Cx1 in the clearoom. | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||