Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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| align="center" | | | align="center" | | ||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
! QC Recipe: | ! rowspan="2" | QC Recipe: | ||
! colspan="4" |Process A | ! colspan="4" |Process A | ||
|- | |- | ||
! colspan="2" | Step 1 | ! colspan="2" | Step 1 | ||
! colspan="2" | Step 2 | ! colspan="2" | Step 2 | ||