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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

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Jmli (talk | contribs)
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==QC template  - try to make you QC recipe + limits look as much as possible like this==
== Quality control procedure ==
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2'''
|bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2'''