Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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== | == Quality control procedure == | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2''' | |bgcolor="#98FB98" |'''Quality Controle (QC) for RIE1 and RIE2''' | ||