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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
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| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
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