Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

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 * Electrical cabinet
-== Process information ==
+== Process information [[Image:section under construction.jpg|70px]] ==
 *[[/Silicon cutting and milling|Silicon cutting and milling]]
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 *[[/Nickel cutting and milling|Nickel cutting and milling]] (for [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]])
 *[[../Mask making|Mask making]]
+=== Laser Processing details ===
+{| {{table}}
+| align="left" valign="top" style="background:LightGray"|''' Material'''
+| align="left" valign="top"  style="background:LightGray"|''' Optics'''
+| align="left" valign="top" style="background:#DCDCDC;"|''' Intensity'''
+| align="left" valign="top" style="background:LightGray"|''' Writing speed'''
+| align="left" valign="top" style="background:LightGray"|''' Parameter file'''
+|- style="background:LightGray" valign="top"
+| Silicon
+| Red (1064nm/255mm)
+| 100%
+| ?? mm/s
+| [[silicon cutting.par]]
+|- style="background:LightGray" valign="top"
+| Silicon with SiliconNitride
+| Red (1064nm/255mm)
+| 100%
+| ?? mm/s
+| [[silicon-SiN cutting.par]]
+|- style="background:LightGray" valign="top"
+| Borofloat glass
+| Red (1064nm/255mm)
+| 100%
+| ?? mm/s
+| [[borofloat cutting.par]]
+|- style="background:LightGray" valign="top"
+| Nickel
+| Red (1064nm/255mm)
+| 100%
+| ?? mm/s
+| [[nickel cutting red.par]]
+|- style="background:LightGray" valign="top"
+| Nickel
+| Green (532nm/255mm)
+| 100%
+| ?? mm/s
+| [[nickel cutting green.par]]
+|- style="background:LightGray" valign="top"
+| Mask making
+| Blue (355nm/103mm)
+| 20%
+| ?? mm/s
+| [[mask making.par]]
+|-
+|}