Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions

From LabAdviser
Jehan (talk | contribs)
Jehan (talk | contribs)
Line 37: Line 37:
== Process information ==
== Process information ==


*[[Specific Process Knowledge/Back-end processing/Silicon cutting and milling|Silicon cutting and milling]]
*[[/Silicon cutting and milling|Silicon cutting and milling]]
*[[Specific Process Knowledge/Back-end processing/Borofloat cutting and milling|Borofloat glass cutting and milling]]
*[[/Borofloat cutting and milling|Borofloat glass cutting and milling]]
*[[Specific Process Knowledge/Back-end processing/Quartz cutting and milling|Quartz cutting and milling]]
*[[/Quartz cutting and milling|Quartz cutting and milling]]
*[[Specific Process Knowledge/Back-end processing/Nickel cutting and milling|Nickel cutting and milling]] (for [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]])
*[[/Nickel cutting and milling|Nickel cutting and milling]] (for [[Specific Process Knowledge/Back-end processing/Polymer Injection Molder|Polymer Injection Molder]])
*[[Specific Process Knowledge/Back-end processing/Mask making|Mask making]]
*[[../Mask making|Mask making]]

Revision as of 15:23, 6 December 2013

Feedback to this page: click here

Laser Micromachining Tool

Lasertool microSTRUCT vario (3D-Micromac AG)
Inside lasertool

The Laser Micromachining Tool is a microSTRUCT vario from the company 3D-Micromac AG.

It is currently only for internal use by Danchip personel for training.
It will be public available for certain processes in October 2013.

The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc.

The machine is located in the basement of building 346 under the cleanroom.

The user manual(s), user APV(s), technical information and contact information can be found in LabManager:

The Laser Micromachining Tool in LabManager

It is equipped with 2 high power lasers:

  • a 50W picosecond laser that can emit light at 3 wavelengths: 355nm, 532nm and 1064nm and a
  • a 100W nanosecond laser with a wavelength of 1064nm.

It consist of these main parts:

  • Upper service way
  • Manual front door
  • Operating panel
  • Machine's feet (adjustable)
  • Left service way
  • Electrical cabinet

Process information