Specific Process Knowledge/Thermal Process/A3 Phosphor Drive-in furnace: Difference between revisions
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*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2846&mach= | *[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=2846&mach=82 The QC procedure for Phosphorus Furnace A3]<br> | ||
*[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId= | *[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=2847 The newest QC data for wet and dry oxide]<br> | ||
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==Overview of the performance of the phosphorus drive-in furnace and some process related parameters== | ==Overview of the performance of the phosphorus drive-in furnace and some process related parameters== | ||