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Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions

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danchip
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Mdyma (talk | contribs)
danchip
584 edits
Line 75: Line 75:
| 1,4625
| 1,4625
| 16,12
| 16,12
| 0,859
| 0,86
|-
|-
! 15  
! 15  
Line 82: Line 82:
| 1,4624
| 1,4624
| 7,4
| 7,4
| 0,392
| 0,39
|-
|-
! 19
! 19
Line 89: Line 89:
| 1,4623
| 1,4623
| 6,6
| 6,6
| 0,246
| 0,25
|-
|-
|}
|}
Line 129: Line 129:
| 1,4604
| 1,4604
| 10,05
| 10,05
| 0,527
| 0,53
|-
|-
! 14  
! 14  
Line 136: Line 136:
| 1,4651
| 1,4651
| 4,72
| 4,72
| 0,216
| 0,25
|-
|-
! 18
! 18
Line 143: Line 143:
| 1,4659
| 1,4659
| 3,23
| 3,23
| 0,165
| 0,17
|-
|-
! Blank Si wafer
! Blank Si wafer
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