Specific Process Knowledge/Thin film deposition: Difference between revisions
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{| {{table}} | {| {{table}} | ||
| align="center" style="background:#f0f0f0;"|''' Dielectrica''' | | align="center" valign="top" style="background:#f0f0f0;"|''' Dielectrica''' | ||
| align="center" style="background:#f0f0f0;"|''' Semicondutors''' | | align="center" valign="top" style="background:#f0f0f0;"|''' Semicondutors''' | ||
| align="center" style="background:#f0f0f0;"|''' Metals''' | | align="center" valign="top" style="background:#f0f0f0;"|''' Metals''' | ||
| align="center" style="background:#f0f0f0;"|''' Alloys''' | | align="center" valign="top" style="background:#f0f0f0;"|''' Alloys''' | ||
| align="center" style="background:#f0f0f0;"|''' Polymers''' | | align="center" valign="top" style="background:#f0f0f0;"|''' Polymers''' | ||
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*[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''Silicon nitride and silicon oxynitride'' | *[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''Silicon nitride and silicon oxynitride'' | ||
*[[/Deposition of Silicon Oxide|Silicon Oxide]] | *[[/Deposition of Silicon Oxide|Silicon Oxide]] | ||
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*[[/Deposition of Platinum|78 Pt Platinum]] | *[[/Deposition of Platinum|78 Pt Platinum]] | ||
*[[/Deposition of Gold|79 Au Gold]] | *[[/Deposition of Gold|79 Au Gold]] | ||
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*[[/Deposition of TiW|TiW]] alloy (10%/90% by weight) | *[[/Deposition of TiW|TiW]] alloy (10%/90% by weight) | ||
*[[/Deposition of NiCr|NiCr]] alloy | *[[/Deposition of NiCr|NiCr]] alloy | ||