Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Both BSA and TSA must be located between -2,5 and +2,5 mm in vertical location from mask center and 60 mm in left and right in horizontal location. | Both BSA and TSA must be located between -2,5 and +2,5 mm in vertical location from mask center and 60 mm in left and right in horizontal location. | ||
Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | Please notice that if you plan to use the automatic alignment option the alignment marks must be displaced from y=0 to y=+/- 1,6mm. | ||
==How to order a mask== | ==How to order a mask== | ||
Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | ||