Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*[[/Making Mask design#How_to_order_a_mask|How to order a mask]] | *[[/Making Mask design#How_to_order_a_mask|How to order a mask]] | ||
==How to order a mask== | |||
Our standard mask supplier is [http://deltamask.nl/ Delta Mask]. | |||
The smallest feature size obtainable from Delta Mask is 1.5 µm. If you need structures smaller than this please write it specificly in the e-mail. Be aware that this will increase the price by at least a factor of 3. | |||
Send your *.cif file or *.gds file (for 7" mask or masks with CD under 1.5µm only *.gds should be used) in an e-mail along with a text file describing your specs ([[mask_spec|example spec file]]). E-mail address can be found in [[Danchip_contact_information]]. Cost according to Danchip price list. | |||
== KS Aligner == | == KS Aligner == | ||