Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Equipment info in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=259 LabManager] | Equipment info in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=259 LabManager] | ||
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=== Equipment performance and process related parameters === | |||
{| border="2" cellspacing="0" cellpadding="2" | |||
!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
UV exposure | |||
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!style="background:silver; color:black" align="left" valign="top" rowspan="5"|Performance | |||
|style="background:LightGrey; color:black"|Exposure mode | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
*Flood exposure | |||
*Proximity exposure with mask possible for 4inch substrate | |||
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| style="background:LightGrey; color:black"|Exposure light/filters | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
* Near UV | |||
* Deep UV | |||
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|style="background:LightGrey; color:black"|Minimum structure size | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
|- | |||
|style="background:LightGrey; color:black"|Mask size | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
5x5inch optinal | |||
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|style="background:LightGrey; color:black"|Alignment modes | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
No alignment possible | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Substrate size | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
Up to 8inch substrates, different shapes | |||
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| style="background:LightGrey; color:black"|Allowed materials | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
All cleanroom materials | |||
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|style="background:LightGrey; color:black"|Batch | |||
|style="background:WhiteSmoke; color:black" align="center" colspan="2"| | |||
1 | |||
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|} | |||
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