Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
Alignment and UV exposure | Alignment and UV exposure | ||
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|style="background:LightGrey; color:black"|Exposure mode | |style="background:LightGrey; color:black"|Exposure mode | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
soft contact, hard contact, proximity, flood exposure | soft contact, hard contact, proximity, flood exposure | ||
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| style="background:LightGrey; color:black"|Exposure light/filters | | style="background:LightGrey; color:black"|Exposure light/filters | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
*365 nm, light intensity 7,0 mW&cm2 in Constant Intansity (CI2)mode | *365 nm, light intensity 7,0 mW&cm2 in Constant Intansity (CI2)mode | ||
*303 nm filters optinal | *303 nm filters optinal | ||
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|style="background:LightGrey; color:black"|Minimum structure size | |style="background:LightGrey; color:black"|Minimum structure size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
down to 1µm | down to 1µm | ||
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|style="background:LightGrey; color:black"|Mask size | |style="background:LightGrey; color:black"|Mask size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
*5x5inch | *5x5inch | ||
*7x7inch | *7x7inch | ||
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|style="background:LightGrey; color:black"|Alignment modes | |style="background:LightGrey; color:black"|Alignment modes | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
*Top Side Alignment(TSA) | *Top Side Alignment(TSA) | ||
*Bottom Side Alignment(BSA) | *Bottom Side Alignment(BSA) | ||