Specific Process Knowledge/Thermal Process: Difference between revisions
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== Choose an equipment to use == | == Choose an equipment to use == | ||
*[[/A1 Bor Drive-in furnace|Boron Drive-in furnace (A1)]] - ''For oxidation and annealing of Si | *[[/A1 Bor Drive-in furnace|Boron Drive-in furnace (A1)]] - ''For oxidation and annealing of Si wafesr, and for boron pre-deposition (doping) and for drive-in afterwards'' | ||
*[[/A2 Bor Pre-dep furnace|Boron Predep furnace (A2)]] - ''For pre-deposition (doping) of boron on Si wafers'' | *[[/A2 Bor Pre-dep furnace|Boron Predep furnace (A2)]] - ''For pre-deposition (doping) of boron on Si wafers'' | ||
*[[/A3 Phosphor Drive-in furnace|Phosphorus Drive-in furnace (A3)]] - ''For oxidation and annealing of Si wafers and for drive-in after phosphorus pre-dep'' | *[[/A3 Phosphor Drive-in furnace|Phosphorus Drive-in furnace (A3)]] - ''For oxidation and annealing of Si wafers and for drive-in after phosphorus pre-dep'' | ||