Specific Process Knowledge/Etch/Wet Aluminium Etch: Difference between revisions
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==Wet Aluminium Etch== | ==Wet Aluminium Etch== | ||
[[Image: | [[Image:BHF-PolySi-Al-etch.jpg|300x300px|thumb|Wet Aluminium Etch: Positioned in cleanroom 4 to the right in the bench]] | ||
Wet etching of aluminium is done with two different solutions: | Wet etching of aluminium is done with two different solutions: | ||