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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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*350W Hg-lamp
*350W Hg-lamp
*365nm filter, intensity in Constant Intensity mode 7mW/cm2 @ 365 nm
*365 nm notch filter, intensity in Constant Intensity mode: 7mW/cm2 @ 365 nm
*303nm filter optional  
*303 nm filter optional  
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|style="background:WhiteSmoke; color:black"|
*350W Hg-lamp
*350W Hg-lamp
*SU8 filter, intensity in Constant Power mode 7mW/cm2 @ 365 nm
*SU8 filter (long-pass), intensity in Constant Power mode: 7mW/cm2 @ 365 nm
*365nm filter optional
*365 nm filter optional


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