Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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== EVG Aligner == | == EVG Aligner == | ||
[[Image:EVG620.jpg|300x300px|thumb|Aligner-6inch EVG620 is placed in Cleanroom 13.]] | [[Image:EVG620.jpg|300x300px|thumb|left|Aligner-6inch EVG620 is placed in Cleanroom 13.]] | ||
EVG620 aligner is designed for high resolution photolithography. | EVG620 aligner is designed for high resolution photolithography. | ||
The machine can be used for 2, 4 and 6 inch substrates. Cassette-to-cassette handling option is available only for 6inch substrates. | The machine can be used for 2, 4 and 6 inch substrates. Cassette-to-cassette handling option is available only for 6inch substrates. | ||