Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 11: | Line 11: | ||
'''The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager:''' | '''The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager:''' | ||
Equipment info in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view& | Equipment info in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&page_id=169 LabManager] | ||