Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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==Manual Spinner( Polymers)== | |||
[[Image:Opticoat.jpg|200×200px|right|thumb|The Manual Spinner(Polymers) is placed in fumehood in Cleanroom 3.]] | |||
The Manual Spinner(Polymers), Opticoat SB20+, from SSE Sister Semiconductor Equipment, are dedicated for spinning of imprint polymers, e-beam resist in small batches, SU8 resist and other polymers with extra addictive like color, nano particles etc. | |||
There are 2 hotplates with temperature range up to 250C, placed in the same fumehood, which can be used for baking before/after spinning. | |||
'''The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager:''' | |||
Equipment info in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=251 LabManager] | |||
Revision as of 07:04, 12 June 2013
Manual Spinner( Polymers)
The Manual Spinner(Polymers), Opticoat SB20+, from SSE Sister Semiconductor Equipment, are dedicated for spinning of imprint polymers, e-beam resist in small batches, SU8 resist and other polymers with extra addictive like color, nano particles etc.
There are 2 hotplates with temperature range up to 250C, placed in the same fumehood, which can be used for baking before/after spinning.
The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager:
Equipment info in LabManager