Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
Appearance
No edit summary |
|||
| Line 171: | Line 171: | ||
|- | |- | ||
|Core-Ge | |Core-Ge | ||
| | |~188 nm/min | ||
| | |~1.46969 | ||
|- | |- | ||
|Top-BPSG | |Top-BPSG | ||