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Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions

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== Thermal evaporation of Chromium==
== Thermal evaporation of Chromium==


Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, we use dedicated 4" long chromium plated tungsten rods (supplier: KJLC). During power ramp up, the material warms up and sublimates. Unlike deposition of Al and Ag, where simple crucibles are used with point-source evaporation from bottom to the substrate, the deposition of chromium proceeds in all directions. To prevent the deposition on the side-walls and the bottom of the chamber a specific protecting shield is mounted beneath the tungsten rod.
Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, for the Cr thermal source we have experimented with Cr pellets in a W boat as well as dedicated 4" long chromium plated tungsten rods (supplier: KJLC).  


The process described on this page uses the Cr plated W rod. However, we have found that using Cr pellets is easier in the long run as it does not require modifying the chamber layout. So the current method you will most likely use is using pellets. There will be some differences from what is described below, e.g., uniformity will be different.
===Cr evaporation from Cr-coated W rod===
During power ramp up, the material warms up and sublimates. Unlike deposition of Al and Ag, where simple crucibles are used with point-source evaporation from bottom to the substrate, the deposition of chromium from a coated rod proceeds in all directions. To prevent the deposition on the side-walls and the bottom of the chamber a specific protecting shield is mounted beneath the tungsten rod.


<b>The shield design was developed by Henrik Nielsen (Nanolab, ThinFilm), and build by Nanolab Facility service. The process was developed and tested by Evgeniy Shkondin (Nanolab, ThinFilm) in december 2020.</b>
<b>The shield design was developed by Henrik Nielsen (Nanolab, ThinFilm), and build by Nanolab Facility service. The process was developed and tested by Evgeniy Shkondin (Nanolab, ThinFilm) in december 2020.</b>
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