Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions
Appearance
mNo edit summary |
|||
| Line 214: | Line 214: | ||
[[image:eves_20210126_Cr_thermal_evaporator_09.png|center|300x300px|thumb|Figure 8. Thickness distribution across 6" wafer. Measurement is performed using [[Specific_Process_Knowledge/Characterization/ | [[image:eves_20210126_Cr_thermal_evaporator_09.png|center|300x300px|thumb|Figure 8. Thickness distribution across 6" wafer. Measurement is performed using [[Specific_Process_Knowledge/Characterization/Dektak_XTA|Dektak stylus profilometer]].]] | ||
<br> | <br> | ||