Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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|Core-Ge | |Core-Ge (not possible anymore as we have no Germanium) | ||
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=Recipes on PECVD2 for deposition of silicon oxides <span style="color:Red">EXPIRED!!!</span>= | =Recipes on PECVD2 for deposition of silicon oxides <span style="color:Red">EXPIRED!!!</span>= | ||