Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions
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Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, we use dedicated 4" long chromium plated tungsten rods (supplier: KJLC). During power ramp up, the material warms up and sublimates. Unlike deposition of Al and Ag, where simple crucibles are used with point-source evaporation from bottom to the substrate, the deposition of chromium proceeds in all directions. To prevent the deposition on the side-walls and the bottom of the chamber a specific protecting shield is mounted beneath the tungsten rod. | Chromium can be thermally evaporated in the [[Specific_Process_Knowledge/Thin_film_deposition/thermalevaporator|Thermal Evaporator]] (NANO 36 THERMAL EVAPORATOR SYSTEM). At DTU Nanolab, we use dedicated 4" long chromium plated tungsten rods (supplier: KJLC). During power ramp up, the material warms up and sublimates. Unlike deposition of Al and Ag, where simple crucibles are used with point-source evaporation from bottom to the substrate, the deposition of chromium proceeds in all directions. To prevent the deposition on the side-walls and the bottom of the chamber a specific protecting shield is mounted beneath the tungsten rod. | ||
The shield design was developed by Henrik Nielsen (Nanolab, ThinFilm), and build by Nanolab Facility service. The process was developed and tested by Evgeniy Shkondin (Nanolab, ThinFilm) in december 2020. | |||
<b>The shield design was developed by Henrik Nielsen (Nanolab, ThinFilm), and build by Nanolab Facility service. The process was developed and tested by Evgeniy Shkondin (Nanolab, ThinFilm) in december 2020.</b> | |||
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