Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Thermal evaporation of Cr in Thermal evaporator: Difference between revisions
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== '''Recipe and process performance''' == | == '''Recipe and process performance''' == | ||
{| border="2" cellspacing="0" cellpadding="9" | {| border="2" cellspacing="0" cellpadding="9" | ||
!colspan="1" border="none" style="background:WhiteSmoke; color:black;" align="center"|Deposition rate (Å/s) | !colspan="1" border="none" style="background:WhiteSmoke; color:black;" align="center"|Deposition rate (Å/s) | ||
|style="background:WhiteSmoke; color:black"|<b>1</b> | |style="background:WhiteSmoke; color:black"|<b>1</b> | ||
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!style="background:WhiteSmoke; color:black;" align="center"|Maximum Thickness | !style="background:WhiteSmoke; color:black;" align="center"|Maximum Thickness | ||
|style="background:WhiteSmoke; color:black" align="center"|100 nm | |style="background:WhiteSmoke; color:black" align="center"|100 nm | ||
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|style="background:WhiteSmoke; color:black" align="center"|0.305 | |style="background:WhiteSmoke; color:black" align="center"|0.305 | ||
|- | |- | ||
|} | |} | ||