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LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/AZO pillars: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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<gallery caption="" widths="500px" heights="600px" perrow="2">
<gallery caption="" widths="500px" heights="600px" perrow="2">
image:AZO_pillars_fab_supplementary_eves.jpg| Figure 3. SEM verification for each fabrication step of pillars production. Left side shows cross-sectional images and right side of the Figure shows the top view of the structures.
image:AZO_pillars_fab_supplementary_eves.jpg| Figure 3. SEM verification for each fabrication step of pillars production. Substrate is normal Si-wafer. Left side shows cross-sectional images and right side of the Figure shows the top view of the structures.
image:AZO_tubes_fab_supplementary_eves.jpg| Figure 4. SEM verfication for each fabrication step of tube production. Left side shows cross-sectional images and right side of the Figure shows the top view of the structures.
image:AZO_tubes_fab_supplementary_eves.jpg| Figure 4. SEM verfication for each fabrication step of tube production. Substrate is silicon-on-isolator (SOI). Left side shows cross-sectional images and right side of the Figure shows the top view of the structures.
</gallery>
</gallery>


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