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LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/AZO pillars: Difference between revisions

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Created page with "====Procces flow description==== =====Si template fabrication===== The whole fabrication work took place in a class 100 cleanroom. First, standard double side polished Si (10..."
 
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<gallery caption="" widths="500px" heights="600px" perrow="1">
<gallery caption="" widths="500px" heights="600px" perrow="1">
image:Fabrication_schematic_AZO_pillars_eves2.jpg| Scheme of fabrication flow. High aspect ratio AZO nanopillars and tubes.
image:Fabrication_shematic_AZO_pillars_eves2.jpg| Scheme of fabrication flow. High aspect ratio AZO nanopillars and tubes.
</gallery>
</gallery>
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<gallery caption="" widths="500px" heights="600px" perrow="3">
<gallery caption="" widths="500px" heights="600px" perrow="3">
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