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LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/EMT Procces flow: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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|XPS can be used in depth profile mode. Ar<sup>+</sup> ions erodes the surface of multilayers, allowing the inspection of each layer.
|XPS can be used in depth profile mode. Ar<sup>+</sup> ions erodes the surface of multilayers, allowing the inspection of each layer.
||Equipment used: [[Specific_Process_Knowledge/Characterization/XPS#XPS-ThermoScientific|XPS-ThermoScientific]]. Results of depth profiling presented: [[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers#Investigation_of_chemical_composition_in_multilayers_system| XPS results]] .
||Equipment used: [[Specific_Process_Knowledge/Characterization/XPS#XPS-ThermoScientific|XPS-ThermoScientific]]. Results of depth profiling presented: [[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers#Investigation_of_chemical_composition_in_multilayers_system| XPS results]] .
  |[[image:mask1_SiO-etch-2.jpg|150x150px|center]]
  |[[image:XPS_depth_Al_10_AL.jpg|150x150px|center]]
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