Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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|400 | |400 | ||
|380LF | |380LF | ||
|Developed for waveguides | |Developed for waveguides | ||
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|1PBSG | |1PBSG | ||
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|Developed for waveguide top cladding | |Developed for waveguide top cladding by ''Haiyan Ou @DTU Photonics'' | ||
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