Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions
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[[File:PECVD2_RI_vs_B-P_graph.jpg]] | |||
=Recipes on PECVD3 for deposition of doped oxide= | =Recipes on PECVD3 for deposition of doped oxide= | ||