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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using PECVD: Difference between revisions

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See [[Specific Process Knowledge/III-V Process/thin film dep/pecvd2| here]]
See [[Specific Process Knowledge/III-V Process/thin film dep/pecvd2| here]]


=Recipes on PECVD1 for deposition of silicon oxides=
=Recipes on PECVD1 for deposition of silicon oxides <span style="color:Red">Expired!</span>=
===Recipes===
===Recipes===
{| border="1" cellspacing="0" cellpadding="7"
{| border="1" cellspacing="0" cellpadding="7"
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