Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
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====Test measurement==== | ====Test measurement==== | ||
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[[image:Resistivity.png|300x300px|right|thumb|Resistivity]] | |||
[[image:Sheet_resistance.png|300x300px|right|thumb|Sheet resistance]] | |||
There was made several measurement on the different wafer in the process. After the Predep was the Phosphorus glass layer thickness measured and the sheet resistance and slice resistivity measured on the same after a BHF etch. | There was made several measurement on the different wafer in the process. After the Predep was the Phosphorus glass layer thickness measured and the sheet resistance and slice resistivity measured on the same after a BHF etch. | ||