Specific Process Knowledge/Thermal Process/Dope with Phosphorus: Difference between revisions
| Line 58: | Line 58: | ||
! width="120" | Thinkness [nm] | ! width="120" | Thinkness [nm] | ||
! width="120" | Refrative index | ! width="120" | Refrative index | ||
! width="120" | Sheet resistance [Ω] | ! width="120" | Sheet resistance [Ω<sub>sq</sub>] | ||
! width="120" | Slice Resistivity [] | ! width="120" | Slice Resistivity [Ωcm] | ||
|- | |- | ||
! 3 | ! 3 | ||